Elemental mapping of cross sections of deposited layers on inboard tiles in the JET divertor after exposure to plasma operations with carbon wall are presented. The study was made using microbeam ion beam analysis methods in combination with optical microscopy and SEM. The surfaces had been exposed to plasma through different periods of operation (1998-2007, 2007-2009 and 1998-2009). The texture and composition of the layers are non-uniform. The physical structures include columnar, lamellar and disordered globular appearances. The distribution of trapped deuterium was frequently found to be lamellar, with well-defined sub layers with higher deuterium concentration. However, 3D regions with dimensions of about 100µm with enhanced deuterium content were also found, both at the layer surfaces and in the layer cross sections. The distributions of beryllium and Inconel components were lamellar but did not otherwise show large non uniformity on the same scale length as the deuterium.