The inner divertor of the ITER-like wall of JET was studied by laser-induced breakdown spectroscopy (LIBS) to show the feasibility of the method as in-situ diagnostics in JET and ITER. The elemental depth profiles agreed with those given by earlier SIMS measurements. Deuterium was detected in the deposited layers and successfully distinguished from hydrogen. The largest amounts of deuterium were found on the apron of Tile 1 and at the bottom parts of Tile 3, whereas Tile 4 showed thin but relatively deuterium-rich layers. Beryllium, on the other hand, was mainly deposited above the inner strike point, as also suggested by SIMS. The results of these studies support LIBS as a promising in situ replacement for post mortem methods in monitoring metallic deposited layers.